Profilm3D optical profiler

【儀器管理員 Administrators】

• 陳易詩 Chen, Yi-Shih / as0191533[at]gate.sinica.edu.tw / 02-2789-8978 (0911-663-539)
• 朱敬庭 Zhu, Jing-Ting / a00501907[at]gate.sinica.edu.tw / 02-2789-8419 (0923-831-009)
• 沈介磐 Shen, Jie-Pan / jpshen[at]phys.sinica.edu.tw / 02-2789-8907
• 黃仲仁 Huang, Jung-Ren / ajrhuang[at]gate.sinica.edu.tw / 02-2789-6759

【特殊安全規則 Special safety notices and regulations】

使用者安全與儀器保全 User and instrumentation safety

• 確實填寫紀錄本，未確實填寫者停權兩周。儀器若有任何問題，請立即向管理員反映。
  Fill out the logbook accurately; failure to do so can lead to the penality of two-week account suspension. Inform administrators immediately of any apparatus issues.


• 請勿更改任何電腦、硬體及軟體的設定。實驗時把數據存放在指定資料夾內，並在實驗後從電腦移除。所有數據會在周五或必要時刪除。
  Do not modify any setup parameter value of the computer, hardware, and software. Save data in a designated folder during experiment and remove data from the computer after experiment. All data will be deleted on Fridays or whenever necessary.


• 震動會嚴重影響量測，因此量測過程中請勿碰觸儀器及氣浮的光學桌。如果發現光學桌面沒有水平或氣浮，請立即通知管理員。
  Instrument vibration affects measurements greatly. Do not touch the instrument or the floating table during measurement. If the level of the table is off or the table is no longer floating, contact administration immediately.


• 注意樣品與物鏡間的距離，在對焦時、或更換物鏡時、或移動樣品時請勿讓樣品與物鏡碰撞。
  Pay attention to the gap between the smaple and the objective. Do not let them collide when focusing, changing the objective, or moving the sample.


• 實驗室備有訪客用室內鞋，經常使用儀器者應自帶實驗室用鞋。
  Indoor shoes for visitors are provided. Frequent users should bring their own laboratory shoes.

【儀器重點規格 Main specifications】

Constact admininstrators for detailed specs.

• 名稱 Name: 3D光學輪廓儀 Filmetrics Profilm 3D
• Objectives: 10X, 50X
• Z Range：100mm
• Piezo Range：500μm
• Scan speed, Vertical：12μm/sec
• XY Stage Range：100mm x 100mm; Type：Automated
• Camera Zoom In：1X, 2X, 4X
• WLI Thickness Range： 50nm - 10mm; RMS Repeatability, WLI：1.0nm
• PSI Thickness Range： 0 - 3μm; RMS Repeatability, PSI：0.1nm
• Step-Height accuracy：0.7%, precision：0.1%
• Image stitching capability

【使用者資格與教育訓練 User qualification and training】

• 合格使用者須通過管理員認可的教育訓練，包括現場教學與實習。教育訓練會定期實施或依需求辦理。只有合格使用者才能進入實驗室並預約使用儀器。
  Qualified users must pass the training certified by the administrators. The training includes on-site tutorial and practice sessions and will be offered regularly or on demand. Only qualified users can gain access to the lab and reserve the instrument.


• 預備知識 Prerequisite: suggested WWW search keywords: "optical profiler", "optical profilometry"


• 教育訓練資源與教材 Training resources and materials: Profilm 3D quick user manual, Profilm 3D software manual

【預約 Reservation】

• 申請使用 Application
• 儀器預約系統 Apparatus Reservation System (ARS)

【收費 Charge】

• No charge yet.