最近更新: 2015年1月21日

  A He3/He4 dilution refrigerator designed for DC and RF experiments. It is equipped with six microwave coaxial cables with attenuators, circulators, directional couplers and wide-bandwidth low-temperature amplifier (right panel), enabling transmission and reflection measurements at frequencies up to 20GHz.

  

  Home-made current/voltage amplifier with build-in bias circuit. The measurement system is designed with minimization of noise level in mind. In order to decrease the external pick-up noise, the entire circuit, from biasing to voltage/current amplifiers, is full symmetric with respect to the ground. The amplifier circuit with input current less than 10fA is designed for high-impedance devices. Straight and angle measurement sample holders are attached on the amplifier to illustrate the operation of the amplifier.

 

   A He 3 /He 4 dilution refrigerator equipped with a 5T superconducting magnet and measurement instruments. When using with our home-made amplifier (on the top of the fridge), the system allows low-level signal measurements (fA, uV) at mini-Kelvin temperatures.

 

  A home-assembled UVH 6kW e-gun evaporator. A 10''-gate valve is used to separate the bottom e-gun chamber and the top sample chamber. This design allows fast pumping-down after sample exchange and easy fill of evaporants. The system is equipped with an inlet-gas pressure regulator and tilt/rotation sample holder which can accommodate 6'' wafers. All valves and the pumping system are controlled by a touch-panel PLC unit, allowing easy-operation and protection against abnormal conditions.

 

  A 4-source 200A thermal evaporator. The cover lid is incorporated with a rotation chip holder which allows normal-angle evaporation from each of the 4 boats. All valves are PLC-controlled, allowing easy-operation and protection against abnormal conditions.

 

  Our laboratory is in charge of maintenance of a full range of nano-fabrication equipment, including laser writer, mask aligner, spin coater, hot plates, optic microscope, scanning electron microscopes, electron-beam writers, evaporator and dry etchers (ICP and RIE). These equipment are allocated in a class-1000 cleanroom, and are partly supported by the AS core facility program (for details, see http://www.phys.sinica.edu.tw/~nanofacilities/).

 

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中央研究院物理研究所 台北市南港區研究院路二段128號
電話:02-2789-8955 及 02-2789-8323,02-2789-8960 (無塵室) 傳真:02-2783-4187
Institute of Physics, Academia Sinica Nankang, Taipei, Taiwan 11529 R.O.C.
(Lab) 886-2-2789-8955 and (Clean room) 886-2-2789-8323 , 886-2-2789-8960   Fax: 886-2-2783-4187

Academia Sinica