RIE

【儀器管理員】劉芳綺 / lycopene[at]gate.sinica.edu.tw / 02-2789-8464

1. 儀器全名：Reactive-Ion Etching 反應式離子蝕刻系統
2. 服務簡介：This machine provides surface etching. The following etching gases O₂, Ar, CF₄ and SF₆ are used for sample etching. Sample size is limited to eight inches in diameter.
3. 收費標準：
   • 1,500 NTD/1hr
   • 訓練費及考核費：1,500 NTD/1hr
   • 代工費用為使用費2倍