Mask Aligner

【儀器管理員】劉芳綺 / lycopene[at]gate.sinica.edu.tw / 02-2789-8468

1. 儀器全名：Mask Aligner 光罩對準紫外光微影系統 (EVG620)
2. 服務簡介：We provide S1813 photoresist and standard Micrometer Lithography Process.
3. 儀器規格：
   • Mask size (diameter): five inches, four inches
   • Sample size (diameter): two inches, four inches, slice (size above 1cm square and below 2 inches in diameter)
4. 收費標準：
   • 700 NTD/1hr
   • 訓練費及考核費：700 NTD/1hr
   • 代工費為使用費2倍