Laser Writer (DWL66)

【儀器管理員】劉芳綺 / lycopene[at]gate.sinica.edu.tw / 02-2789-8464

1. 儀器全名：Laser Writer 雷射聚焦直寫系統 (DWL66)
2. 服務簡介：
   • Maskless lithography
   • Accept .dxf .gds file type
   • dxf and gds files need to be drawn with "Closure Polyline"
3. 儀器規格：
   • Sample size: up to 5 inches, minimum size 1cm square (4mm border required)
   • Minimum line width: 0.7 um
   • Stable line width: 2 um (using s1813G photoresist)
   • Alignment error: about 0.5um
4. 收費標準
   • 1,500NTD/1.5hr
   • 訓練費及考核費：1,500NTD/1.5hr
   • 代工費用為使用費2倍