原子力顯微儀(AFM)—安信倫科技

本實驗室於2004年購置了一台多功能型原子力顯微儀，除了表面形貌量測之外，其功能尚包含了靜電力與側向力的量測；尤其針座的設計具有可以直接在水溶液中進行軟物質實驗的優點。目前為止，本實驗室使用這台儀器與臺基電合作在45奈米線之寬電晶體量測摻雜濃度、奈米尺度下之摩擦力量測、表面量子點之形貌等。另外使用懸臂探針進行蛋白質樣品的操空亦是本實驗室目前的主要技術發展目標。

Reference:
  1. W. C. Lai et al., “Lattice-resolved frictional pattern probed by tailored carbon nanotubes,” 2010 Nanotechnology 21, 055702. (co-first author)
  2. S. C. Chin et al., “The fabrication of carbon nanotube probes utilizing ultra-high vacuum transmission electron microscopy,” 2009 Nanotechnology 20, 285307.
  3. S. C. Chin et al., “Nanoscale doping fluctuation resolved by electrostatic force microscopy via the effect of surface band bending,” 2008 Applied Physics Letters 93, 253102.
  4. S. C. Chin et al., “Two-dimensional dopant profiling by electrostatic force microscopy using carbon nanotube modified cantilevers,” 2008 Nanotechnology 19, 325703.