化學品(光阻與顯影液)供應項目 Chemicals (Photoresist and developer)
Acetone;Isopropyl alcohol;DI water;S1813G;LOR 5B;TMAH 2.2%;PRS-2050;MIBK(1:3 MIBK:IPA) ;RemoverPG;Zep520a ;PMMA A2(A4 A6 8.5A)
**光阻與60mL深色廣口瓶,取用請登記(登記於顯微鏡旁電腦,取用表格內)
**如需攜入其他化學藥品,請與蔡禮在聯絡(0903-635-495)
儀器介紹Instrument Introduction
以下儀器不須預約 No appointment required (暫不收費 No charge for use)
**1F**
Photoresist Coating Machine
Hotplate
Microscope (with micron size measurement function)
High-pressure gas
secondary deionized water
**B1**
Surface Profiler
Wire bonding machine
UV Ozone Cleaning
以下儀器須預約 Appointment required (按使用時段收費 Charges based on time of use)
儀器收費標準 Charges for the use of equipment
ELS 7000 | Mask aligner(EVG-620) | ICP(Elionix) | RIE | Evaporator |
6000/3Hr | 1000/ 1.5Hr | (09:00am-19:00pm):1,500
NTD/2hr (19:00pm-09:00am):1,000 NTD/2hr |
1500/ Hr | 1500/3Hr |
Laser Writer(DWL66) | DBFIB | SEM(InspectF ) & AFM(Innova) &ELS 8800 | ICP(SAMCO) | |
1500/1.5Hr | 3000/3Hr | 0/Hr * | (09:00am-19:00pm):1,500 NTD/2hr (19:00pm-09:00am):1,000 NTD/2hr |
*The cost of consumables and regular maintenance is divided equally according to the proportion of time spent
**中研院院內價:費用*60% ; 院外請Email詢問詳談
ELS7000
儀器管理員:李藍暄
E-mail: LanHsuanLee@gmail.com
Tel: 02-2789-8955
Mask aligner(EVG-620)
儀器管理員::蔡禮在
E-mail: link21215@gate.sinica.edu.tw
Tel: 02-2789-8303
儀器簡介
儀器管理員::蔡禮在
E-mail: link21215@gate.sinica.edu.tw
Tel: 02-2789-8303
Evaporator
儀器管理員:程皓廷
E-mail: chenght@gate.sinica.edu.tw
Tel: 02-2789-8401
ICP(Elionix)
儀器管理員:游良堃
E-mail: lkyu@phys.sinica.edu.tw
Tel: 02-2789-8354
ICP (SAMCO RIE10iP)
儀器管理員:游良堃
E-mail: lkyu@phys.sinica.edu.tw
Tel: 02-2789-8354
Nova600 FIB
儀器簡介
儀器管理員::賴韋僑
E-mail: simman@gate.sinica.edu.tw
Tel: 02-2789-8359
Innova
儀器管理員:賴韋僑
E-mail: simman@gate.sinica.edu.tw
Tel: 02-2789-8359
InspectF
儀器管理員:賴韋僑
E-mail: simman@gate.sinica.edu.tw
Tel: 02-2789-8359
RIE
儀器管理員:蔡禮在
E-mail: link21215@gate.sinica.edu.tw
Tel: 02-2789-8303
ERA-8800
儀器管理員:蔡瑋瀚
E-mail: ham0444@gmail.com
Tel: 02-2789-8301