儀器狀態 Instrument Availability
B105 cleanroom B1 | Available |
B105 cleanroom 1F | Available |
ICP (EIS700) | Available |
ICP (SAMCO RIE10iP) | Available |
Mask Aligner (EVG-620) | Available |
RIE | Available |
Evaporator | Available |
ELS 7000 | Available |
laser writer (DWL-66) | Available |
SEM (InspectF) (B216) | Available |
AFM (Innova) (B216) | Available |
Nova600 FIB | Available |
最新消息 NEWS
2022/3/22
A new Quantum Materials Shared Facilities web site will
be launched on 4/1. It will replace the old Cleanroom and
Quantum Materials Public Laboratory web sites. The URL of
the new web site is https://www.phys.sinica.edu.tw/~qmsf/.
From 4/1, please go to the new web site to make
appointments to use cleanroom facilities. The account and
password should be the same as the old website. However
if you are unable to log in successfully, please use
Forgot Password to change the password.
新的量子材料公用實驗室網頁於4/1啟用,將取代原有的無塵室及量子材料公用實驗室的網頁.新網頁網址是 https://www.phys.sinica.edu.tw/~qmsf/.
從4/1起,欲使用無塵室設施請至新網頁預約.帳號以及密碼都和舊網頁相同,若無法登入,請使用忘記密碼以更改密碼.
2022/03/07
In order to take advantage of the annual campus wide electrical shutdown on 3/13, the cleanroom will be closed starting from noon on 3/11 to replace a power relay for the main cooling water chiller's power supply.
2022/1/11
ELS 7000 is available now.
2022/1/5
AFM has moved to B216.
2022/1/3
Nova600 FIB is available now.
2021/11/30
因12/2監視設備更新,無塵室B1暫停開放。
The B1 clean room will be closed on12/2 due to the installation of monitoring equipment.
2021/11/25
因11/29監視設備更新,無塵室暫停開放。
The clean room will be closed on 11/29 due to the installation of monitoring equipment.
2021/11/2
純水機將在11/4上午10點施工,預計暫停供水3小時。
The water purifier will be constructed at 10 am on 11/4, and DI water supply is expected to be suspended for 3 hours.
2021/9/29
Due to the maintenance and renewal of the Clean room partition and dehumidification equipment, the clean room will be closed on 10/21 and 10/22.
2021/9/29
There will be a fire drill on 10/6
2021/9/17 (Fri.)
The clean room will be closed for one day on 9/17 due to chemical exhaust hood maintenance.
2021/8/9
Due to the maintenance of high voltage electricity , the clean room will be closed at 16:00 on 9/3(Fri.), and will be opened as scheduled at 9:00 on 9/6(Mon.) if all goes well.
2021/8/2
The clean room must be closed for one day because Professor Chii-Dong Chen's equipment needs to be moved in on 8/2.
2021/7/26
RIE has been repaired
2021/7/22
RIE under repair
2021/6/16
無塵室B1現在正常開放
Cleanroom is now open normally
2021//6/11
因為陳啟東老師的設備將在6/16裝機。地點在B1無塵室。預計會有四名工程師加上一名同仁監工。為了達到三級標準防疫要求無塵室B1必須暫停服務一天。
Because Professor Chii-Dong Chen's equipment will be installed on 6/16. The location is in the B1 clean room. It is expected that there will be four engineers plus a colleague supervisor. In order to meet the COVID-19 Level 3 Alert Requirement, clean room B1 must be suspended for one day.
2021/5/13
RIE is now available
2021/4/21
Laser writer is available from now on. Please ask
Li-Zai Tsai to complete the training.
2021/3/25
RIE turbo pump being repaired and maintained,currently out of service.
Please contact Li-Zai Tsai at the P1E office or at
0903-635-495(2789-8303) or by email at
link21215@gmail.com before April 30 to update your cleanroom contract.
If you cannot access the clean room after
April 30, please ask Li-Zai Tsai as well.