2023/11/14(Tue) 14:00 -16:00 一樓演講廳 1F, Auditorium
Title
EUV lithography
Speaker
林本堅院士 (國立清華大學半導體研究學院) Academician Burn-Jeng Lin (College of Semiconductor Research, National Tsing Hua University)Abstract
EUV lithography is introduced in terms of light source, imaging, mask, resist, its potential, and challenges
Poster
Language
演講語言 (Language): in Mandarin