Analysis Techniques of Nano-scale Thin Films

 

Instructor: Lee, Chih-Hao

Course Description:

This course describes the application techniques of material characterization tools, such as photon beam, electron beam, ion beam, tip probe, and neutron beams for the ultra-thin film analysis. The analysis methods include, energy spectrocopy, diffraction and scattering method, and imaging technology. This course will emphize on the limitation of each material analysis method, the sources of the beam and detection methods.

Evaluation:

Term paper (30%), Final Exam: general common sense (50%), classroom meeting (20%)

Text Books:

J.C. Vickerman," Surface Analysis-The Principal Techniques", Wiley (1997).
材料分析, 汪建民編, 材料學會

References:

Woodruff and Delchar, "Modern Techniques of Surface Science", Cambridge (1994).

 

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