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Facility list

Core facilities are operated through the NanoCore managing system. Some shared facilities in the Academia Sinica, although may not operated through the same system, are available to Academia Sinica users and collaborators.

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Core facilities (operated through the NanoCore managing system)

  FEG-TEM

  Nanoparticles fabrication system

  Dual Beam FIB

  E-beam writers (ELS-7000)

  Laser writer

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Shared facilities (please see contact information for each facility)

  TEM sample preparation

  Mask aligner

  Etching systems (RIE, ICP etcher)

  Evaporator

  E-beam writer (ERA-8800)

  Vibrating Sample Magnetometer (VSM)

  Multi-channel Cell test system

  MALDI-TOF Mass Spectrometer

  Dip-Pen Nanolithography system

  Thermal diffusivity system

  Confocal Spectral Microscope

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