沾筆奈米顯微系統 (Dip-Pen Nanolithography System)

型號: NscriptorTM (Nanoink Inc., Chicago, IL).

          The AFM was equipped with a temperature- and relative humidity-controlled chamber built in-house.

儀器放置地點: 中央研究院化學研究所 A005

設備負責人: 陶雨台 博士

儀器管理者: 曾喬委 02-27898580

　

有意使用本儀器者須先與儀器管理者及儀器負責人聯絡，討論技術細節，以決定是否適合及如何使用本儀器。

　

Features

1. Nanoscale Registry and Alignment

2. Customized CAD tool capability uniquely made for DPN pattern design

3. Functions as an excellent stand- alone atomic force microscope and allows imaging and DPN patterning capability with both contact and AC modes

4. Closed loop linearized scanner design which is critical for consistent nanolithography and imaging

5. 3-motor leveling system critical for use with 1D or 2D probe arrays

6. InkCal™ calibration routine for ink diffusion

7. Tip-to-Tip alignment wizard for multi-pen patterning

8. E-Chamber: PC-driven environmental control

　

Specifications

DPN Stage

  • Solid granite support base, size: 16” x 16” x 14”, weight: 122 lbs (loaded) l        

  • Color CCD video camera with motorized zoom (4X) and focus capability

  •  Video magnification: 900X, with 260 x 340 micron field of view, 3 micron resolution

  • Seven motors: two for X-Y sample puck translation, one for camera lens zoom, one for 10x lens focus, and three for Z-axis leveling and Z tip-approach

  • 3 independently adjustable Z motors serve to level the plane of the scanner assembly

  • X-Y sample translator motors: min. 3 micron step size, 1” x 1” travel, max. 2.5 mm/sec slew rate

  • Maximum sample size: 2” across, < 1.5” thick, and can be attached to a magnetic central post

DPN Scanner  

  • ≥ 90 micron scan X-Y range with better than 1% linearity (corrected)

  • ≥ 8 micron Z range

  •  Noise floor < 0.1 nm in Z (when operated with complete damping of environmental noise)

  • Scanning is performed with a tripod stack piezo configuration (i.e., independent X,Y,Z piezos)

  • Closed-loop sensors perform calibration & linearization of piezo scanner in X, Y, and Z

E-Chamber

  • Inside dimensions: 28” x 23” x 29”

  • Outside dimensions: 34” x 30” x 36”

  • Humidity range: min. = 5% Rh, max. = 75% Rh (below dew point)

  • Set point stability: ± 0.5 % Rh

  • Sensor resolution: ± 2.0 % Rh

  • Temperature range: min. = 2°C less than room temperature max. = up to 10°C greater than room temperature

  • Setpoint stability: ±0.2 °C (given a stable room temperature)

  •  Detection resolution: 0.1 °C for full scale
　

 

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