Since 2006.01.01

An Academia Sinica logo written on PMMA resist using the e-beam writer (ELS 7000). The smallest line width is less than 20nm.

 

 


Mail: NanoCore Facilities Center, Institute of Physics, Academia Sinica, 128 Sec. 2 Academia Rd., Nankang, Taipei 11529, Taiwan (台北市南港區研究院路二段128號, 中央研究院,物理研究所,奈米核心設施中心)

Email: nanocore@phys.sinica.edu.tw