Atomic Force Microscope—Asylum Research MFP-3D

This is a multi-functional tapping/contact mode AFM system. It contains the typical topography measurement, electrostatic force measurement with nap mode (lift mode), and lateral force measurement. The tip holder is especially designed for the liquid AFM. We have so far used this instrument to engage the dopant profiling on sub-45-nm CMOS devices, topography measurement of quantum dot structure, and nanoscale friction measurement. Also, the cantilever as a DNA manipulation tool in liquid has been achieved.

Reference:
  1. W. C. Lai et al., “Lattice-resolved frictional pattern probed by tailored carbon nanotubes,” 2010 Nanotechnology 21, 055702. (co-first author)
  2. S. C. Chin et al., “The fabrication of carbon nanotube probes utilizing ultra-high vacuum transmission electron microscopy,” 2009 Nanotechnology 20, 285307.
  3. S. C. Chin et al., “Nanoscale doping fluctuation resolved by electrostatic force microscopy via the effect of surface band bending,” 2008 Applied Physics Letters 93, 253102.
  4. S. C. Chin et al., “Two-dimensional dopant profiling by electrostatic force microscopy using carbon nanotube modified cantilevers,” 2008 Nanotechnology 19, 325703.