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| RESEARCH FACILITIES |
| There are more than 20 research laboratories in our institution.
These laboratories are equipped with some of the most advanced instruments
in the world. Followings are brief descriptions of the research facilities
in some of them. |
| A. Surface Physics Laboratories: |
A.表面物理實驗室： |
There are various surface analysis instruments in these laboratories.
We have a pulsed laser time of flight (TOF) atom-probe field ion microscope
with the highest TOF mass resolution in the world for studying the fundamental
processes of field evaporation and field desorption. Furthermore, there
are five ultra-high-vacuum scanning tunneling microscopes (PARK, JEOL and
OMICRON), and two atomic force microscopes (PARK and NanoscopeIII), which
are used to image atomic structure and manipulate atoms at surfaces. We
also have a high resolution electron energy loss spectrometer with double
pass monochromator and a rotatable analyzer of 3meV resolution; a quadruple
mass spectrometer with mass range from 1 to 200 a.m.u.; an electron spectroscopy
for chemical analysis system (ESCA MKII) with twin anode X-ray, UV, low
energy ion, electron sources, and a field ion microscope; a field emission
microscope. Besides, A UHV system completed with angle-resolved electron
energy analyzer (VG), cylindrical mirror analyzer (CMA, Perkin-Elmer) is
dedicated for photoemission measurements using synchrotron radiation at
Synchrotron Radiation Research Center (SRRC), Hsinchu. A photoelectron emission
microscope (PEEM, Staib) is also located at SRRC for synchrotron spectromicroscopy.
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本實驗有各種不同的表面分析儀器，如有一部全世界最佳飛行時間質譜分析的脈衝雷射飛行時間原子探針場離子顯微鏡，用來研究場蒸發、場脫附等基本步驟，還有五部超高真空（UHV）掃描穿隧顯微儀（PARK、JEOL及OMICRON）及兩部原子力顯微儀(PARK及Nanoscope
III)，用來觀察表面上的原子結構及操控原子。另有一高解析電子能量損失頻譜儀配有雙通分光儀及3meV解析度的可旋轉分析儀；一具可量測質量從1至200
a.m.u.的四極質譜儀，一具化學分析電子能譜（ESCA MKII）系統配有雙陽極X-光、UV、低能量離子、電子源及一場離子顯微鏡；一具場發射顯微鏡。另外，在同步輻射有一部配有角度分析電子能量分析儀（VG）、圓柱鏡面分析儀（Perkin-Elmer）的UHV系統從事光電子發射量測，也有一光電子發射顯微鏡從事頻譜顯微術。
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| B. Thin Film Laboratory: |
B. 薄膜實驗室： |
| There are several thin film deposition systems including:
a 1.3 KW microwave plasma chemical vapor deposition system (MPCVD) and a
hot-wired CVD system for diamond thin film study; a DC sputtering system
and a molecular beam epitaxy (EIKO EL-10A) system for magnetic metal films
and superlattices study. There is a Hitachi field emission scanning electron
microscope (FESEM) S-4200 for topographic analysis of thin films. |
薄膜成長系統包括有：1.3千瓦微波電漿化學蒸氣鍍膜系統(MPCVD)可研究鑽石薄膜，高真空濺鍍系統；分子束磊晶系統(EIKO
EL-10A)可研究磁性金屬薄膜，超晶格等。另外有Hitachi場發射掃描式電子顯微鏡(FESEM)S-4200可做薄膜表面分析，並加裝了寫的功能，可從事電子束蝕刻的微小樣品製作。 |
| C. Magnetic Properties Laboratory: |
C. 磁性實驗室 |
| We have been able to measure anisotropic magnetoresistance,
forced magnetoresistance, magneto-striction, Hall effect, and magnetization
properties in ferromagnetic materials. They were carried out by the low
temperature and the high field facilities. Room temperature Magneto-Optical
Kerr Effect Maonetometer and Magnetic Force Microscope are also available.
Optical microscopes are used for domains observation and metallurgical purposes.
For thermal treatments on an alloy, post-anneal, quenching, and field-anneal
are available. |
我們能夠量測異性向磁電阻、受迫磁電阻、磁伸縮、霍爾效應和鐵磁物質的磁矩性質，所有這些量測都能夠在低溫高磁場設備中進行。在室溫下，我們有磁光科爾效應磁性儀、磁力顯微儀。在熱處理方面，有高溫爐並可做磁場下退火處理。 |
| D. Clean Room: |
D. 無塵室： |
| At the time when the new building was about to ready, we started
to build a clean room for nano-device fabrication. This clean room is located
at the basement of the new building, and it has been put into normal operation
since Oct. 1999. It is designed as a class 1000 clean room, and, according
to the latest check performed in Nov. 2000, it still keeps at about class-500
cleanness. Inside the clean room, we have a converted Hitachi S4200 SEM
for use as an electron-beam writer; the minimum line-width achieved was
about 30nm. We also have a home-made UHV e-gun evporator and a simple home-made
thermal coater for thin film deposition, a reactive ion etcher RIE-200W
from Plasma Sciences Inc for resist-cleaning and metal film-etching. In
addition, there is a Dimension 3100 SPM for surface morphology characterization
and nano-structure modification/fabrication. In the yellow room, there is
an EV620 optical mask aligner, from Electronic Visions, for G-line UV-exposure,
which can accommodate up to 6" wafers. This aligner together with standard
chemical hoods, resist-coater, vacuum-oven, precision 6" hot-plates
and high-resolution optic microscope facilitate high-quality photolithography
in our institute. |
當物理所新館即將完成之際，我們即著手建立奈米元件製作所需的無塵室；此無塵室位於物理新館的地下一層，並從民國八十八年十月已經正常運作。當初規劃為1000級的無塵室，依據最近民國八十九年十一月的測試顯示，其潔淨度仍然保持於約500的等級。在無塵室中，我們有改裝的日立
S-4200 型掃瞄式電子顯微鏡（Hitachi S-4200 SEM）做為電子束微影機使用，最小線寬可達約 30 奈米。我們也有一部自行組裝的超高真空電子槍蒸鍍系統與簡易型的熱蒸鍍系統，用以進行薄膜的沈積。在微影阻劑的清除及金屬薄膜的蝕刻方面，我們運用了
Plasma Sciences 公司的RIE-200W型活性離子蝕刻反應器。在表面形態檢測與奈米結構的修改與製作上，我們則利用了 Dimension
3100 型掃瞄式探針顯微鏡。再者，在黃光室中，我們擁有一部 Electronic Visions 公司的EV-620型光罩對準曝光機，可以進行六吋晶圓G-line
波段的紫外線曝光；此曝光機的運作，配合標準的化學通風櫥、微影阻劑塗佈機、真空烤箱、精密六吋加熱板與高解析度光學顯微鏡，使我們在物理所中達成高品質的光學微影製程。 |
| E. Low Temperature Laboratory: |
E. 低溫實驗室 |
The laboratory is equipped with the following equipments and
apparatus: Two He3 inserts for temperature ranged from 0.3K to 300K; a dilution
refrigerator with the lowest available temperature to 15mK; a DC and AC
Squid for magnetic susceptibility measurements; an 11Tesla super-conducting
magnet; a home-made relaxation mico-calorimeter used for heat capacity measurements
with mass and heat capacity resolutions 100μg and 1 x 10-7Joul/K respectively;
a rotating anode X-ray diffractometer supplied with low and high temperature
attachments for temperature region 10K to 800K. With these equipments the
experimental measurements such as resistivity, heat capacity and magnetization
can be performed within high magnetic field and a wide temperature region.
A couple of sample preparation chambers and arc furnaces can be used to
prepare miscellaneous specimens of nanoparticle, film and bulk for various
proposed experiments. |
本實驗室配備有下列量測儀器與設備：
氦三低溫樣品測試儀兩套，實驗溫區從0.3K到300K；稀泠機一套，最低溫可達15mK； 一具超導100μg之樣品，其能量解析700K之樣品。藉著以上之實驗設備，本實驗室可從事11T磁場下15mK到300K之電阻，比熱量測，並藉一套商用之磁量子干涉儀，可從事2K-400K之磁性量測。
本實驗室同時有製作超微粒樣品，塊材樣品，薄膜樣品之真空系統，可提供各種實驗所需之特殊樣品。 |
| F. Laser Light Source Laboratory: |
F. 雷射光源實驗室 |
| We have several laser light sources which include a dye laser
(COHERENT CR-599), an argon ion laser (SP-2000) and a Nd:YAG laser (STY-600).
We also have a single and a double mono-chromator (JOBINYVON HR-640 AND
U-1000), a 10~300k cryosystem (RMC-4000), a 2000k high temperature furnance
(LINDBERG BLUEM) and a complete system of Czochralski crystal puller. These
facilities are used in the studies of non-linear crystals. |
我們有數種雷射光源如下：染料雷射(COHERENT CR-599)，氬離子雷射(SP-2000)，摻釹石榴石雷射(STY-600)單狹縫，雙狹縫干涉儀，低溫循環系統10~300k
(RMC-4000)，高溫爐2000k (LINDBERG BLUEM)紫式提拉系統利用這些儀器做為研究非線性光學的設備。 |
| G. Accelerator Laboratory: |
G. 加速器實驗室 |
The main facilities in this laboratory include a 3MV 9SDH-2
pelletron tandem accelerator which was installed in 1989. Since then the
accelerator became an important facility for experimental research in the
low energy nuclear physics, accelerator based atomic physics, and applied
accelerator technology. The accelerator system has two negative ion sources,
SNICS for solid source material and Alphatross for noble gases Helium-3
and Helium-4, capable of producing a wide range of ion beam species. The
ion-beams for a given charged (q) state with a maximum energy E=3(q+1)MeV
can be obtained and selected by an analyzing magnet to meet experimental
need. There are three beamlines available with different scattering chambers
for various research needs. We have made the accelerator open for users
from outside the Institute. Every year a fraction of the machine time was
provided to professors of local institutions such as Institute of Atomic
and Molecular Sciences, Academia Sinica, the National Tsinghua University,
National Taiwan University and National Chung Sun University.
Other facilities in this laboratory include a 400 keV positive ion accelerator,
large volume NaI(T) and HpGe gammaray spectrometer systems, silicon surface
barrier charged particle detectors and computer based MCA multiparameter
data analysis and acquisition systems. In mid-1998, we will establish a
nuclear microprobe system (triplet magnets), manufactured by the Oxford
Microbeams Ltd. Such new system in connection with the accelerator will
provide us useful facility for studies of materials science and bio-technology.
Here are the links of our Spring-8 experiment photos:
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本實驗室3MV串級加速器(NEC 95DH-2)於一九八九年五月裝設完成後拓展研究領域係朝向低能原子核物理、原子物理及應用物理等三方面。此加速器系統有二個負離子源，一為SNICS離子源，是以固體材料做陰極，可產生多種不同之陰離子，從氫離子至金離子，另一為Alphatross離子源，是以氣體做陰極，主要用於產生氦三與氦四負離子，所加速離子之能量可達3(q+1)MeV，其中q為陽離子的電荷數。本實驗室目前已裝設完成三條離子束線，以射束方向為基準，右30°線為外射束適合於在非真空環境（即大氣）下從事物質元素定性定量分析用。0°線及散射室，可用於一般散射粒子和X-射線及光子符合量度適合於低能核反應和離子－原子碰撞及應用物理研究，而本年度裝設完成在左30°線
之牛津式核微探針系統，則適用於微米範圍內物質物理特性、成份分析及物質改性等研究。每年度並提供相當的機器時間給本院原分所、台大凝態科學中心和中山大學物理系與材料系等學術機構使用，並從事有關奈米材料、巨磁阻薄膜與輻射損害等合作研究。
其它設備包括有輻射偵檢器，含量測荷電粒子之固態偵檢器，量測X-射線之高純度鍺低能量X-射線偵檢器及量測伽馬射線之高純度鍺偵檢器等。另外，我們設計製造的TOF（飛行時間）陣列閃爍偵檢器已順利安裝在日本同步輻射中心（Spring-8）並與大板大學進行LEP（雷射－電子－光子）實驗，同時亦正發展偵測粒子之軌跡重建的相關分析軟體。此外我們建立有數據擷取裝置，MCA-PC（多頻道分析儀－個人電腦）及實驗室工作站網路架設。總之，上述實驗研究所需之軟硬體設備已粗具規模，今後除秉持既定方向繼續努力外，主要工作為力求研就課題之精緻化，並提高研究工作之品質，開拓新研究領域及加強與國內外研究人員從事合作研究。 |
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| H. Water Channel Laboratory: |
H. 水洞實驗室 |
We have a water channel in the Water Channel Laboratory to
study the hydrodynamic phenomena of under water flow when controlled air
current is imposed above the water surface. The channel has a cross section
of 60cm x 60cm and 8m long. Flow can be realized by a towing track mounted
on the channel or by a closed loop type pumping system that circulate the
fluid inside the channel. A wave generator is installed for making wave
of various amplitude and frequency. The flow can be measured using hot wire,
hot film and salinity gauge. Recently a particle imaging velocimetry system
with high resolution camera and digital imaging capability has been developed
for quantitative measurement of the flow field in the water channel.
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在水洞實驗室我們有一台水洞可以研究水面上之加壓氣流如何影響水面下的水流動力行為。此水洞的斷面為60釐米 x 60釐米，全長 8米。其上裝有造波機以產生各種強度和頻率的水波。水流可以由循環泵浦系統從或用水洞的拖曳軌道產生。流場可以用熱線、熱膜儀來量測。最近我們發展了一套用高解析度相機和影像和數位處理系統的粒子影像測速設備來觀察水洞中的流場。 |
| I. Optical hydrodynamic laboratory: |
I. 光學流力實驗室 |
We have an optical hydrodynamic laboratory for studying the
basic phenomena in complex fluids and non-linear phenomena in hydrodynamics
systems. The research instruments include a high resolution (2048×2048 pixels)
high dynamic range (16 bit) air cooled CCD camera, a two dimension laser
Doppler velocimeter, a commercial goniometer for static and dynamic light
scattering measurement, two digital correlators, an optical microscope with
a temperature controlled stage that can be cooled down to -196。C , a fluorescent
microscope, several image acquisition and analysis systems, a fast line
scan camera, ..., etc. There are also many home made instruments for particular
experiments. We have several computer controlled programmable temperature
air and water bath for studying phase transitions of complex fluids, a laser
scanning reflectometer for measuring the shape of liquid interfaces, an
automatic film pulling setup with synchronized electric spark and video
capture system to observe the rupturing of soap film. A mechanical rotating
stage with wireless communication and remote control for studying granular
flow.
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光學流力實驗室是研究複合流體、流體動力系統和顆粒流的非線性現象的實驗室。研究設備包括高解析度(2048x2048像素)氣冷式CCD照相機，二維雷射都卜勒測速儀、量測光散射的測角器、兩個數位相關器、光學顯微鏡、瑩光顯微鏡、一些影像擷取分析系統、快速線性攝影機。此外還有很多為了配合特殊實驗所設計的設備，例如：我們有一些控制適當溫度的空氣和水的電腦程式來探討複合流體的相變、雷射描掃反射計用來量測液體界面的形狀。自動拉膜系統(同步電火花和影像擷取系統)去觀察肥皂膜的破裂行為。無線傳輸和遙控機械式旋轉平台用來研究顆粒流。 |
| J. Neutrino and Astro-particle Physics
Group |
J. 微中子及天文粒子物理研究小組 |
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The group was started in 1997 with the goal of initiating and pursuing
a program of experimental neutrino and astro-particle physics in Taiwan.
The TEXONO Collaboration, at present 40-member strong, has been built
up, under the leadership of the Academia Sinica group, and with the participation
of several major research institutes from Mainland China. The efforts
represent the first particle physics experiment performed in Taiwan as
well as the first large-scale research collaboration among scientists
from Taiwan and Mainland China.
The "flagship experiment" is based on a detector with 200 kg
of CsI(Tl) placed near the core of Nuclear Power Plant II at the northern
coast of Taiwan to study various low-energy neutrino interactions. The
Collaboration is responsible in all aspects in the conception, planning,
construction and execution of the experiments. Much technical skills and
scientific connections have been established during the efforts. Various
R&D projects are launched, in further enhancing the detector techniques,
in developing methods to measure trace radiopurities, and in exploring
the feasibilities of future experiments in areas like Dark Matter searches
and Solar Neutrino studies. Close communications are established with
theorists in Taiwan with the goal of initiating a complementary theory
program.
1. A 40-cm long CsI(Tl) crystal, the basic detector unit.
2. A Flash-Analog-Digital-Convertor designed and built by the Collaboration.
3. The shielding on site at the Nuclear Power Plant II.
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微中子研究小組始於1997年，目標為推動微中子物理及天文粒子物理的研究方向。小組亦為TEXONO合作團隊的領導成員，團隊集台灣及中國大陸四十餘跨領域的專長，為海峽兩岸大型學術研究的合作開創先河。
合作團的重點實驗，位於台灣北部核能二廠爐心旁，放置200kgCsI(Tl)閃爍晶體探測器，以研究低能區微中子物理。合作團隊負責籌畫執行該實驗的構想、設計、建造、運轉及分析等每一程序，實驗技術及合作關係因而確立。數項研究課題也同時啟動，包括探測器的改良，放射性同位素的測量，以及太陽微中子及黑暗物質測量方法的探討。合作團也與本地理論學者有密切溝通，以期建立相應的理論研究計劃。
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中央研究院物理所 / 台北市115南港區研究院路二段128號
Institute of Physics, Academia Sinica, Taipei 11529, Taiwan
Tel:886-2-2788-0058 / Fax:886-2-2783-4187
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