專題演講

2018/06/19(Tue)     10:30 -12:00    5th Floor(1st meeting room)

Title

FOCUS: All about electrons…

Speaker

Dr. Michael Merkel

CEO, FOCUS GmbH

Abstract

FOCUS is an owner-managed German company established in 1990 with today more than 30 highly educated employees. We are selling all of our in-house developed products world wide both to scientific and to industrial customers.
My presentation will give a brief survey of our numerous ctivities on the diversified fields of applied physics like e-beam evaporation, e-beam welding and micro-structuring, electron spectroscopy, electron spin analysis, photoemission electron microscopy (PEEM, TOF-PEEM, xTOFPEEM, NanoESCA, Momentum Microscope, HAXPEEM see eg. [1, 2, 5, 6]) and related applications.
Some recent developments will be presented more in detail.
Using optical high technology and based on our well-proven standard VUV source HIS 13 our new highly brilliant monochromatic VUV source HIS 14 HD Mono can be switched to deliver a monochromatic HeI(21.2eV) or HeII(40.8eV) photon beam what is free of any disturbing satellites and focused down to about 300μm. We will show first related Momentum Microscope and ARPES applications using this souce.
One of our specialties is electron spin detection. During the last years we developed the today most efficient spin polarization detector, called FERRUM, as our latest product for spin analysis which can be combined with state of the art ARPES electron spectrometers [3, 4] or even as SEMPA detector with an SEM.
Our electron energy analyzer HVCSA can be operated with high energy electrons up to 15 keV. Its major application is bulk sensitive XPS with hard xrays(HAXPES). We will show some applications.
Based on our patented NanoESCA( see one on the left hand figure equipped with TOF detection and 2D spin filtering) we’ve undertaken a further step towards true“3D HAXPES”. The so called HAXPEEM microscope is a world-novelty being able to image energy filtered electrons up to 10 keV. We’ve demonstrated the feasibility of this new method as an analytical tool for bulk sensitive chemical and electronic analysis. The instrument allows a sub-micrometer resolution and a high probing depth making HAXPEEM a promising technique for the 3D analysis of micro-structured and layered samples, commonly encountered in electronic device engineering [5].
FOCUS is also the maker of a desktop sized power beam machine which is made for material treatments (welding, drilling, surface modification) at the micro scale by means of a focused high power electron or laser beam in vacuum. We will give a short instrument description and show some applications also. (Paper)