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An Academia Sinica logo written on PMMA resist using the e-beam writer (ELS 7000). The smallest line width is less than 20nm. ¡@ |
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¡@ Mail: NanoCore Facilities Center, Institute of Physics, Academia Sinica, 128 Sec. 2 Academia Rd., Nankang, Taipei 11529, Taiwan Email: nanocore@phys.sinica.edu.tw ¡@ |
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